| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate housing container which supports a flexible substrate with high dimensional accuracy and holds it properly on the front retainer of a cover without causing any trouble in loading, or the like, of the substrate, and can eliminate the risk of damaging the substrate. SOLUTION: The substrate housing container includes a container body 1 for housing a semiconductor wafer W, and a cover 20 which opens or closes the container body 1, wherein a support 30 which supports the semiconductor wafer W horizontally is arranged in the container body 1, and a pair of front retainers 34 which hold the semiconductor wafer W on the opposite sides at the front peripheral edge thereof are attached to the cover 20. Assuming the center line of the semiconductor wafer W in the loading/unloading direction thereof is the center line Y, and the center line intersecting the center line Y perpendicularly is the center line X, the arrangement region of the support 30 for the sidewall 7 of the container body 1 is set so that the front 32 side falls within the range of 20-30°for the center line X, and the rear 33 side falls within the range of 20-53°for the center line X. The fixing region of the pair of front retainers 34 which are attached to the cover 20 on both sides of the center line Y falls within the range of 40-110°. COPYRIGHT: (C)2011,JPO&INPIT |
