| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm structure of a diaphragm type pressure measuring device alleviating hydrogen permeation more than a conventional diaphragm, by arranging a platinum group element metal layer and a permeation alleviation metal layer on a diaphragm body. SOLUTION: The permeation alleviation metal layer 16, and the platinum group element metal layer 17 are laminated successively on the measuring object fluid side surface of the diaphragm body 15 of the diaphragm type pressure measuring device. Hydrogen is restored into water by the platinum group element metal layer 17, to thereby reduce a hydrogen amount reaching the permeation alleviation metal layer 16, and further hydrogen permeation is alleviated by the permeation alleviation metal layer 16. COPYRIGHT: (C)2011,JPO&INPIT |
