| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel surface inspection means, capable of efficiently inspecting the surface of an object to be inspected, even when the area of the object to be inspected is wide and capable of determining a long surface flaw as a single flaw, even without having to apply a special signal processing. SOLUTION: The surface of the object X to be inspected is irradiated with a light from a light source 10, and the surface flaw of the object X to be inspected is detected, on the basis of the intensity of the scattered light reflected from the surface of the object X to be inspected. Relative movement is given across the surface of the object X to be inspected and the light source 10 to scan the surface of the object X to be inspected by light, and the irradiation light 11 is set as a long line-shape light, in a direction which is at a right-angle with respect to the scanning direction of the light, to detect the surface flaw of the object X to be inspected on the basis of the intensity of the scattered light from the entire region of the irradiation light 11. COPYRIGHT: (C)2011,JPO&INPIT |
