| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for achieving an actuator capable of performing high-accuracy operation by a simple configuration while suppressing an increase in manufacturing costs. SOLUTION: When an actuator is manufactured, the following processes (I) and (II) are executed. In a process (I), there is prepared a plate-like member that is formed by stacking a plurality of layers including a layer composed by using a first material and a layer composed by using a second material whose degree of deformation with respect to a temperature change is different from that of the first material. In a process (II), etching is applied to the plate-like member so as to make the thickness of one or more layers, constituting a partial plate-like part of the plate-like member, thinner than that of one or more layers constituting the remaining plate-like part, excluding the partial plate-like part, of the plate-like member, or to remove one or more layers from the partial plate-like part. COPYRIGHT: (C)2011,JPO&INPIT
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