TEMPLATE, METHOD OF MANUFACTURING THE SAME, AND METHOD OF FORMING PATTERN

摘要

PROBLEM TO BE SOLVED: To provide: a template achieving a highly accurate size by correcting sizes of depressions and projections, and allowing a plurality of duplicate templates of different sizes to be efficiently produced from a same mother template; a method of manufacturing the template; and a method of forming a pattern. SOLUTION: The template transfers a pattern onto a transfer layer 51 provided on a substrate 50 to be processed when pressed against the transfer layer. The template 110 includes a first die 10, wherein the first die has: a first substrate 11 having first depressions and projections 10dp provided on a first principal surface 11a; and a first film 12 covering the first depressions and projections and made of the same material as that of the first substrate. COPYRIGHT: (C)2011,JPO&INPIT