| 摘要 |
PROBLEM TO BE SOLVED: To supply a drive voltage accompanied by a high frequency large current in a semiconductor element. SOLUTION: Metal bus lines 31A, 31B arranged obliquely to each other in a horizontal direction are electrically connected with each other, and metal bus lines 32A, 32B arranged in the same manner are electrically connected with each other. The metal bus line 32B is located over the metal bus line 31A with spacing, and the metal bus line 31B is located over the metal bus line 32A with spacing. Drive voltages of opposite phases are supplied to the metal bus lines 31A, 31B and the metal bus lines 32A, 32B. COPYRIGHT: (C)2011,JPO&INPIT
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