EDGE DETECTION METHOD, LENGTH MEASUREMENT METHOD, CHARGED PARTICLE BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a technique for dynamically setting the size of an area to be measured, and detecting an edge of a semiconductor pattern with accuracy. SOLUTION: An edge detection method detects the second edge orthogonal to the edge to be detected, and sets a final scan range inside the second edge by scanning an image area which is slightly larger, including the edge of the semiconductor pattern among observed images. COPYRIGHT: (C)2011,JPO&INPIT