| 发明名称 |
THIN-FILM BATTERY METHODS FOR COMPLEXITY REDUCTION |
| 摘要 |
Thin-film battery methods for complexity reduction are described. Processing equipment arrangements suitable to support thin-film battery methods for complexity reduction are also described. Cluster tools to support thin-film battery methods for complexity reduction are also described. |
| 申请公布号 |
US2011129594(A1) |
申请公布日期 |
2011.06.02 |
| 申请号 |
US20100882009 |
申请日期 |
2010.09.14 |
| 申请人 |
|
发明人 |
KWAK BYUNG-SUNG;KRISHNA NETY M. |
| 分类号 |
B05D5/12;B05C11/00;B05D1/36;B05D1/38;B05D3/02;B05D3/10;C23C16/448 |
主分类号 |
B05D5/12 |
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代理人 |
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