PIEZOELECTRIC ELEMENT, AND INKJET RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric thin element with a high piezoelectric strain constant and an excellent adhesion with lower electrode without having the occurrence of cracks in a film during manufacturing, and to provide an inkjet recording head that has the piezoelectric thin element, thereby achieving printing with high definition.

SOLUTION: The piezoelectric thin element includes: a piezoelectric element film 11A composed of a polycrystalline substance; an upper electrode 16; and a lower electrode 12 arranged with the piezoelectric element film 11A interposed therebetween. The crystalline body 11A of the piezoelectric film is formed in the direction almost perpendicular to the surface of the electrode.

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