发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device simple in structure in which a position of a blade detection sensor is not varied. SOLUTION: The cutting device includes a chuck table for sucking and holding a workpiece; a cutting means for rotatably supporting a cutting blade for cutting the workpiece which is sucked and held to the chuck table and feeding cutting water; a blade detection means for detecting a cut-in direction position of the cutting blade; a table base for supporting the blade detection means through a strut; a machining feeding means for moving the table base in a machining feeding direction; a water-proof cover having a first opening for inserting the chuck table and a second opening for inserting the strut of the blade detection means and fixed to the table base; and a bellows connected to the water-proof cover and covering the machining feeding means with the water-proof cover. The water-proof cover is fixed to the table base through a plurality of brackets, the strut is inserted to the second opening of the water-proof cover with a clearance, and the clearance is closed by a seal composed of an elastic member. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011104731(A) 申请公布日期 2011.06.02
申请号 JP20090263594 申请日期 2009.11.19
申请人 DISCO ABRASIVE SYST LTD 发明人 OKUNARI KENGO;MATSUYAMA TOSHIFUMI
分类号 B23Q11/08;H01L21/301 主分类号 B23Q11/08
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