| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state imaging element capable of making the possibility of occurrence of color mixing between pixels less than before. SOLUTION: The solid-state imaging element includes photoelectric conversion units 2, ..., arranged in a matrix, and a vertical CCD unit 3 and a horizontal CCD unit 4 which read signal charges out of the photoelectric conversion units 2, ..., and transfer them. The vertical CCD unit 3 is composed of a transfer channel 7 and a transfer electrode 8 provided for each photoelectric conversion unit 2. Each transfer electrode 8 is disposed in an island shape on a silicon substrate 20 with a first insulating film 30a interposed. A wiring line 9 for applying drive pulses to respective transfer electrodes 8 is provided for each row of photoelectric conversion units 2. A narrow part 9b between transfer electrodes 8 which are adjacent in the row direction of the wiring line 9 is arranged on the silicon substrate 20 with the first insulating film 30a and a second insulating film 30b interposed to make an interval between the narrow part 9b (corresponding to a part corresponding to a gap between electrodes) of the wiring line 9 and the silicon substrate 20 larger than an interval between each transfer electrode 8 and the silicon substrate 20. COPYRIGHT: (C)2011,JPO&INPIT
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