发明名称 |
ENHANCING INTERFACE CHARACTERISTICS BETWEEN A CHANNEL SEMICONDUCTOR ALLOY AND A GATE DIELECTRIC BY AN OXIDATION PROCESS |
摘要 |
In sophisticated transistor elements, long-term threshold voltage shifts in transistors comprising a threshold adjusting semiconductor alloy may be reduced by reducing the roughness of an interface formed between the threshold adjusting semiconductor material and the gate dielectric material. To this end, a portion of the threshold adjusting semiconductor material may be oxidized and may be removed prior to forming the high-k dielectric material.
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申请公布号 |
US2011129970(A1) |
申请公布日期 |
2011.06.02 |
申请号 |
US20100905619 |
申请日期 |
2010.10.15 |
申请人 |
KRONHOLZ STEPHAN;REICHEL CARSTEN;ZEUN ANNEKATHRIN;TRENTZSCH MARTIN |
发明人 |
KRONHOLZ STEPHAN;REICHEL CARSTEN;ZEUN ANNEKATHRIN;TRENTZSCH MARTIN |
分类号 |
H01L21/336 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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