发明名称 |
OPTICAL DETECTION METHOD AND OPTICAL MEMS DETECTOR, AND METHOD FOR MAKING MEMS DETECTOR |
摘要 |
The present invention discloses an optical MEMS detector, comprising: a substrate; at least one photo diode in a region within the substrate; an isolation wall above the substrate and surrounding the photo diode region; and at least one movable part having an opening for light to pass through and reach the photo diode, wherein when the at least one movable part is moved, an amount of light reaching the photo diode is changed.
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申请公布号 |
US2011126623(A1) |
申请公布日期 |
2011.06.02 |
申请号 |
US20090627374 |
申请日期 |
2009.11.30 |
申请人 |
PIXART IMAGING INCORPORATION, R.O.C. |
发明人 |
WANG CHUAN-WEI;HSU HSIN-HUI;LU CHIH-HUNG |
分类号 |
G01D5/34;B29D11/00;G01B11/14;G01P15/00 |
主分类号 |
G01D5/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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