| 摘要 |
PROBLEM TO BE SOLVED: To solve the following problem: commercially available high resolution transmission electron microscopes (HR-TEM) and scanning transmission electron microscopes (HR-STEM) are nowadays equipped with correctors for correcting axial spherical aberration C<SB>S</SB>of the so-named objective lens, inevitably, other aberrations become the limiting aberration, and also, for hexapole type correctors, also known as Rose correctors, six-fold axial astigmatism, also known as A5, and sixth-order three lobe aberration, also known as D6, introduced by the corrector, become the limiting aberration. SOLUTION: The invention can manufacture a Rose-like corrector or a Crewe-like corrector free of A5 or D6 by adding a weak hexapole in the cross-over between the hexapoles. Alternatively, the invention manufactures a corrector without having A5 or D6 by adding both the weak hexapole and a dodecapole. COPYRIGHT: (C)2011,JPO&INPIT |
