| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a base isolating device capable of suppressing damage caused by vibration such as an earthquake, and an exposure device system. <P>SOLUTION: The base isolating device includes a pedestal on which an object is placed, and movement suppressing parts provided to come in point-contact with a plurality of positions of the pedestal and suppressing the movement of the pedestal by a static frictional force and a dynamic frictional force generated between themselves and the pedestal by the point contact. <P>COPYRIGHT: (C)2011,JPO&INPIT |
