| 摘要 |
PROBLEM TO BE SOLVED: To provide an inline-type vacuum film-forming apparatus which can carry in and carry out a substrate without aggravating a degree of vacuum, and to provide a method for producing a magnetic recording medium, which has improved production efficiency. SOLUTION: The inline-type vacuum film-forming apparatus includes: a plurality of chambers which are mutually connected in series; a chamber for carrying out and in the substrate, which is connected to the chamber in the upstream side of the chambers; and a sub-chamber 11 for carrying out and in the substrate, which is connected to the chamber for carrying out and in the substrate. A mechanical pump 30 and an exhaust system 3 for a high vacuum are provided in the sub-chamber 11 for carrying out and in the substrate to be capable of reducing the pressure in the chamber to 1×10<SP>-4</SP>Pa or less. Gates 11a and 11b for carrying out or carrying in the substrate D are provided in the sub-chamber 11 for carrying out and in the substrate so as to be freely opened and closed by gate valves 21 and 22. COPYRIGHT: (C)2011,JPO&INPIT |
