发明名称 CONTACT PROBE, PROBE DEVICE, MEASUREMENT DEVICE, AND INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce measurement time, to simplify a circuit structure, to reduce the generation of operation failure, and to reliably establish connection to a probing object. SOLUTION: The contact probe includes: a probe pin 21; a pillar body 22 having a spiral groove 44 and provided for the probe pin 21; a cylindrical body 23 that is movable in a state in which the pillar body 22 is inserted therethrough; a nonconductive ball 24a provided at the side of the base end part 51 of the cylindrical body 23, engaged with the spiral groove 44 in an insulated state, and pressing the spiral groove 44 in a direction for rotating the pillar body 22 with the movement of the cylindrical body 23; a conductive ball 24b connected to reference potential, provided at the side of a tip end part 52 of the cylindrical body 23, engaged with the spiral groove 44 in an electrically connected state when the cylindrical body 23 is located at the side of the base end part 41 of the pillar body 22, and separated from the spiral groove 44 when the cylindrical body 23 is located at the side of a tip end part 42 of the pillar body 22; and a spring 26 biasing the side of a tip end part 32 of the probe pin 21 in a direction separated from the cylindrical body 23. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011106973(A) 申请公布日期 2011.06.02
申请号 JP20090262433 申请日期 2009.11.18
申请人 HIOKI EE CORP 发明人 SATO YOSHINORI
分类号 G01R1/067;G01R1/06;G01R31/28 主分类号 G01R1/067
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