| 摘要 |
PROBLEM TO BE SOLVED: To measure a resolution of a concentration distribution, ensure a higher responsiveness, easily identify a nozzle shape, and miniaturize a hot-wire concentration meter per se. SOLUTION: The hot-wire concentration meter has a nozzle part 19 formed into a flat rectangular cross-section with a narrow width, capable of sucking a gas at a desired flow rate. A manufacturing method of the hot-wire concentration meter includes: a first step of forming an insulating layer on the surface of a silicon wafer and forming on the silicon wafer a connection channel for connecting to a suction part; a second step of forming a sensor part on the surface of the insulating layer by sputtering; a third step of evaporating a wiring part connected to the sensor part onto the surface of the insulating layer; a fourth step of evaporating an electrode to an end of the wiring part; a fifth step of coating the surface of the insulating layer with a polyimide layer; and a sixth step of etching the nozzle part and a channel communicated with the nozzle part, facing the sensor part, and communicated with the connection channel 31 onto the polyimide layer. COPYRIGHT: (C)2011,JPO&INPIT |
