| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-refractive-index transparent conductive film that is formed by an inexpensive and simple coating method and has excellent transparency, high conductivity, a small refractive index, and excellent flatness, and a method for manufacturing the same. SOLUTION: A manufacturing method for forming an inorganic film is configured as follows. A coating film is formed on a heat-resistant substrate by using coating liquid being an organic metal compound mainly composed of one or more organic metal compounds selected from an organic indium compound, an organic tin compound, and an organic zinc compound. Then, a dried coating film is formed. The dried coating film is baked so as to form an inorganic film mainly composed of one or more metal oxides selected from an indium oxide, a tin oxide, and a zinc oxide. The dried coating film mainly composed of the organic metal compound comprising one or more of organic metal compounds selected from an organic indium compound, an organic tin compound, and an organic zinc compound, is baked under an oxygen-containing atmosphere at a temperature exceeding a dew point of -10°C while raising the temperature at least to a temperature exceeding the baking temperature at which the crystallization of inorganic components occurs so as to remove the contained organic components. Consequently, it is possible to form a low-refractive-index conductive oxide fine-particle layer having voids between fine particles mainly composed of one or more of an indium oxide, a tin oxide, and a zinc oxide. COPYRIGHT: (C)2011,JPO&INPIT
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