| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device allowing for reduction of a line width of a fuse. SOLUTION: In the semiconductor device 1, a dummy fuse DFU is provided adjacent to a fuse FU, each line width of the fuse FU and the dummy fuse DFU is set to the minimum line width, and an interval between the fuse FU and the dummy fuse DFU is set to the minimum interval. Thus, an exposure condition of the fuse FU and the dummy fuse DFU is optimized by an optical proximity correction, thereby forming the fuse FU with the minimum line width. COPYRIGHT: (C)2011,JPO&INPIT |
