| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control system supplying a constant-temperature fluid with controlled predetermined temperature. SOLUTION: First temperature adjusting unit 101 adjusts the temperature of a fluid, and second temperature adjusting unit 108, 109, 110 adjust the temperature of a fluid more accurately than the first temperature adjusting unit 101. A channel downstream of the first temperature adjusting unit 101 is branched into a channel heading toward a first external device 104 and a channel heading toward the second temperature adjusting unit 108, 109, 110. The channel heading toward the first external device 104 forms a circulation path between the first temperature adjusting unit 101 and the first external device 104. Second external devices 105, 106, 107 are disposed downstream of the second temperature adjusting unit 108, 109, 110, and channels downstream of the second external devices 105, 106, 107 are part of the circulation path and are connected to a channel downstream of the first external device 104. COPYRIGHT: (C)2011,JPO&INPIT
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