| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for surely holding and conveying at a high speed a conveying object even when the object or the ambient atmosphere thereof is in either comparatively low or high temperature, and for minimizing dust in conveying the object. SOLUTION: The conveyer 50 includes: a freely stretchable link mechanism 20 having a plurality of arms to which power from a driving source is transmitted; and a mount 5 coupled via a third left arm 3L and a third right arm 3R at the working end of the link mechanism 20 so that a substrate 10 is mounted thereon. In the portion on the downstream side in the substrate conveyance direction of the mount 5, a downstream side energizing mechanism 7 abutting on the side part of the substrate 10 and energizing the substrate 10 in the direction toward the link mechanism 20, when the link mechanism 20 operates, is provided. In the portion on the upstream side in the substrate conveyance direction of the mount 5, an upstream side energizing mechanism 9 abutting on the side part of the substrate 10 and energizing the substrate 10 in the substrate conveyance direction, when the link mechanism 20 operates, is provided. COPYRIGHT: (C)2011,JPO&INPIT
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