| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for cleaning an aluminum nitride sintered compact where adhered matter is removed in a comparatively short time, surface roughness after cleaning is not increased and cost is low. SOLUTION: The method for cleaning the aluminum nitride sintered compact is characterized in that the aluminum nitride sintered compact is cleaned by using a detergent containing nitric acid, sulfuric acid, phosphoric acid and ammonium acetate. The detergent is made of an aqueous solution including 1.0-2.1 mol/L nitric acid, 0.5-1.2 mol/L sulfuric acid, 0.4-1.0 mol/L phosphoric acid and 0.1-0.3 mol/L ammonium acetate. COPYRIGHT: (C)2011,JPO&INPIT
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