| 摘要 |
<p>PURPOSE: A substrate coating device is provided to uniformly coat a composite on a substrate without the influence of air current by minimizing the deformation of the substrate. CONSTITUTION: A substrate transfer unit(102) includes an air blower and a driving unit. The air blower includes a first region for supplying air to the bottom of the substrate to float the substrate and a second region in which air is not supplied. A driving unit(120) is arranged on both sides of the air blower and horizontally transfers the floated substrate. A nozzle unit(104) supplies a photoresist composite to the substrate in the second region when the substrate is transferred.</p> |
