| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a comparatively compact substrate supply device that can reduce idle time during preparation by a simple structure. <P>SOLUTION: The substrate supply device 12, which takes out a substrate 14 from a main tray 16 for housing a plurality of substrates 14, includes a main table 20 that can move the main tray 16 in the y-axis direction while supporting it for housing the plurality of substrate 14, a sub-table 22 that can move a subtray 34 for housing the plurality of substrates 14 supplied when changing the main tray 16 in the y-axis direction while supporting it, and a substrate supply head 24 that takes out the substrate 14 from the main tray 16 or the subtray 34, moves it in the x-axis direction crossing orthogonally the y-axis direction while holding the taken-out substrate 14 to supply the substrate 14. The sub-table 22 can support the subtray 34 wherein substrates 14 more than a quantity necessary for continuous supply of the substrates 14 by the substrate supply head 24 at exchange of the main table 20 are housed. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
