| 摘要 |
PROBLEM TO BE SOLVED: To reliably carry in/out a frame integrated with a processing object between a cassette and a temporarily placing means with a simple structure in a processing device. SOLUTION: In the processing device which includes at least the cassette for housing a plurality of processing objects W integrated with a frame F via a protection tape T, a temporarily placing means 11 for temporarily placing the frame F carried out from the cassette or the frame F carried in the cassette transiently at a predetermined position, and a carrying-in/out means for carrying out the frame F from the cassette to the predetermined position of the temporarily placing means 11 and for carrying in the frame F from the temporarily placing means 11 to the cassette, photoelectrical sensors 116 and 117 are opposite arranged toward the frame F loaded on the temporarily placing means 11 in a first side support part 113 and a second side support part 115 constituting the temporarily placing means 11, and it is possible to detect that the frame F is recognized by both the photoelectrical sensors 116 and 117 when the frame F is properly loaded. COPYRIGHT: (C)2011,JPO&INPIT |
