发明名称 METHOD FOR MANUFACTURING SURFACE-EMITTING LASER
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a surface-emitting laser that secures a refractive index difference between a lower member of a photonic crystal layer and the photonic crystal layer without using a conventional laminating technology. SOLUTION: The method for manufacturing the surface-emitting laser includes: a first step of preparing a material with a clad layer and the photonic crystal layer where fine pores are arranged in an in-plane direction; and a second step of oxidizing the clad layer that is located at a lower side of the photonic crystal layer, to form an oxidizing region with a refractive index lower than that of the photonic crystal layer and a nonoxidizing region on the clad layer. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011109151(A) 申请公布日期 2011.06.02
申请号 JP20110049694 申请日期 2011.03.07
申请人 CANON INC 发明人 UCHIDA TATSURO
分类号 H01S5/183 主分类号 H01S5/183
代理机构 代理人
主权项
地址