发明名称 CONNECTION STRUCTURE
摘要 <P>PROBLEM TO BE SOLVED: To provide a connection structure that has low connection resistance, high insulation reliability, and superior microcircuit connectivity. <P>SOLUTION: The connection structure is constituted by connecting an LSI chip having connection bumps arrayed at a peripheral part of the chip to a connection substrate with an anisotropic conductive film comprising at least a curing agent, a curable insulating resin, and conductive particles, wherein a standard deviation of the number of conductive particles present at a connection part of the connection bumps is &ge;1.45 and smaller than larger one of &le;10% of the average number of the conductive particles present at the connection part and 2, &ge;93% of conductive particles present at an inner part of the connection bumps are present independently and also present on a connection substrate surface side, the conductive particles present at the connection part of the connection bumps and at the inner part of the connection bumps have an average particle size of 1 to 10 &mu;m, and the area of the connection bumps ranges from 500 to 10,000 &mu;m<SP>2</SP>. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011109156(A) 申请公布日期 2011.06.02
申请号 JP20110053968 申请日期 2011.03.11
申请人 ASAHI KASEI E-MATERIALS CORP 发明人 OTANI AKIRA
分类号 H01L21/60 主分类号 H01L21/60
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