| 摘要 |
PROBLEM TO BE SOLVED: To provide a higher quality image at a higher speed with a scanning type microscope using a polygon mirror. SOLUTION: Laser light which is long in one direction and radiated on a sample 2 is scanned in a direction perpendicular to the longitudinal direction on the focal point face of an objective lens 18 with a polygon mirror 15. The observation light from the sample 2 is descanned by using the face used for scanning of illumination light of the polygon mirror 15, condensed by a capacitor lens 14, passed through a slit 19, and scanned on the light receiving face of a CCD image sensor 25 using the same face. The angle in the rotary axis direction A1 of the reflection angle with respect to the face of the polygon mirror 15 when descanning the observation light is equal to the angle in the rotary axis direction A1 of the incident angle with respect to the face of the polygon mirror 15 when scanning, and the magnitude of the image on the face of the polygon mirror 15 when descanning is equal to the magnitude of the image on the face of the polygon mirror 15 when scanning. The present invention is applicable to, for example, a confocal laser scanning microscope. COPYRIGHT: (C)2011,JPO&INPIT |
