| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece continuously-inverting apparatus capable of continuously inverting a workpiece while the inside of a chamber is kept in a vacuum state. SOLUTION: The workpiece continuously-inverting apparatus includes a workpiece holder 32 in which a glass plate 31 having film-deposited surfaces 45, 46 on surface and back sides thereof is attachably/detachably held, a supporting frame 35 supporting the workpiece holder, and a weight ring 27 placed on an annular rail 17 provided on an upper surface of a dome 15. The weight ring 27 is placed so that a plurality of bearing balls 65 placed in a rail groove 20 formed in the annular rail 17 are fitted to an annular supporting groove 28 formed on a lower surface side. Rotary shafts 33, 34 fixed to the workpiece holder 32 are supported by the supporting frame 35, a pinion gear 70 fixed to a gear shaft 71 to be engaged with the rotary shaft 33 with the predetermined friction force is engaged with a rack gear 29 formed on the weight ring 27, and the rotation of the weight ring 27 is transmitted to the workpiece holder 32. COPYRIGHT: (C)2011,JPO&INPIT
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