发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
摘要 A method for fabricating a semiconductor device includes forming a plurality of first trenches by etching a substrate, forming a plurality of buried bit lines in the first trenches, forming a plurality of second trenches to expose at least one sidewall of the buried bit lines by etching the substrate, and forming a plurality of one-sidewall contact plugs which fill the second trenches.
申请公布号 US2011129974(A1) 申请公布日期 2011.06.02
申请号 US20100830066 申请日期 2010.07.02
申请人 EUN YONG-SEOK;PARK EUN-SHIL;KIM TAE-YOON;KIM MIN-SOO 发明人 EUN YONG-SEOK;PARK EUN-SHIL;KIM TAE-YOON;KIM MIN-SOO
分类号 H01L21/336;H01L21/20 主分类号 H01L21/336
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