发明名称 |
REFLECTIVE RETICLE CHUCK, REFLECTIVE ILLUMINATION SYSTEM INCLUDING THE SAME, METHOD OF CONTROLLING FLATNESS OF REFLECTIVE RETICLE USING THE CHUCK, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE CHUCK |
摘要 |
Provided are a reflective reticle chuck, a reflective illumination system including the chuck, a method of controlling the flatness of a reflective reticle using the chuck, and a method of manufacturing a semiconductor device using the chuck. The reflective reticle chuck includes a fixed portion and a mobile portion that together provide a securing surface for the reflective reticle. The mobile portion may alter a height of the securing surface relative to the fixed portion. |
申请公布号 |
US2011128518(A1) |
申请公布日期 |
2011.06.02 |
申请号 |
US20100948370 |
申请日期 |
2010.11.17 |
申请人 |
HEO JIN-SEOK;PARK CHANG-MIN;YEO JEONG-HO;PARK JOO-ON;KIM IN-SUNG |
发明人 |
HEO JIN-SEOK;PARK CHANG-MIN;YEO JEONG-HO;PARK JOO-ON;KIM IN-SUNG |
分类号 |
G03B27/68 |
主分类号 |
G03B27/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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