VERTICAL FILM FORMATION APPARATUS, METHOD FOR USING SAME, AND STORAGE MEDIUM

摘要

PURPOSE: A vertical film forming device, a using method thereof, and a storage medium are provided to reduce the Na density of SiN product layer by trapping Na in a coating layer by Cl. CONSTITUTION: A coating layer is coated on the inner wall of a process container(1). A holding member with a process agent forms a preset film on a target in the process container. First and second process gas is supplied to the process container without a plasma process in a coating process. The first and second process gas is supplied to the process container with a plasma process in a film forming process.