发明名称 |
SLURRY COMPOSITION FOR CHEMICAL MECHANICAL POLISHING AND PREPARATION METHOD OF THE SAME |
摘要 |
PURPOSE: A slurry composition for chemical mechanical polishing is provided to ensure high polishing rate for a silicon oxide film and to enable the application to a shallow trench isolation process for removing an initial step of a silicon oxide film. CONSTITUTION: A slurry composition for chemical mechanical polishing comprises: abrasive particles including cerium oxide particles; one or more additives selected from the group consisting of picolinic acids, propionic acids, and formic acids; and aqueous solution including water. The zeta potential of the abrasive particle surface is 20-70 mV within a range of pH 3-6.
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申请公布号 |
KR20110057876(A) |
申请公布日期 |
2011.06.01 |
申请号 |
KR20090114476 |
申请日期 |
2009.11.25 |
申请人 |
LG CHEM. LTD. |
发明人 |
KIM, JONG PIL;CHO, SEUNG BEOM;SHIN, DONG MOK;NOH, JUN SEOK;HA, HYUN CHUL;CHO, JUN YEON |
分类号 |
C09K3/14 |
主分类号 |
C09K3/14 |
代理机构 |
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地址 |
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