PURPOSE: An IPA supply device is provided to safely heat IPA processing solutions through constant temperature water by installing a heat exchanger on an arm close to a nozzle. CONSTITUTION: A nozzle is installed on a spray head unit(414) for spraying IPA processing solutions to a substrate. An arm unit(416) includes a spray head unit. A support axis(418) is installed on the arm unit and is lifted and rotated by a driving unit. A processing solution supply line supplies the IPA processing solutions to the nozzle. A heat exchanger(600) heats the IPA processing solutions by using constant temperature water.
