| 摘要 |
<p>PURPOSE: A conveying shaft apparatus is provided to improve a conveying roller so as to reduce slip phenomenon when transferring a substrate and effectively transfer the substrate. CONSTITUTION: A conveying shaft apparatus comprises a conveying shaft(100) and a conveying roller unit(200). The conveying shaft is arranged in a direction perpendicular to a substrate transfer direction. The conveying roller part is fixed to the conveying shaft. The conveying roller part comprises a main conveying roller(210) and a substrate contact(220). The main conveying roller is located in the conveying shaft. The substrate contact is attached to an outer spinning face of the main conveying roller. The substrate contact comes into contact with the substrate and conveys the substrate. The substrate contact has an uneven structure.</p> |
