PLASMA IMMERSION ION MILLING AND MILLING METHOD

摘要

PURPOSE: A device and method for processing various kinds of spices using plasma immersion ions are provided to efficiently polish a surface of large cylindrical processing materials by colliding ions accelerated to a sheath with rotary processing materials. CONSTITUTION: Plasma is filled in a vacuum chamber. A support(12) and a rotation device(13) are installed in a vacuum chamber. A cover(15) includes a slot(14) arranged along the surface of the processing materials. The cover is electrically connected to the processing materials. A power source(16) supplies power to the processing materials and the cover.