VACUUM EVAPORATING SOURCES WITH HEATERS DEPOSITED DIRECTLY ON THE SURFACE OF CRUCIBLE, THE METHOD OF MANUFACTURING AND EVAPORATOR

摘要

PURPOSE: A heater-integrated molecular beam evaporation source for vacuum deposition, a manufacturing method thereof, and an evaporator using the same are provided to minimize the thermal load of a vacuum system by controlling the temperature of a heater to be similar to the temperature of a crucible. CONSTITUTION: A heater-integrated molecular beam evaporation source for vacuum deposition comprises a PBN(Pyrolytic Boron Nitride) crucible(10), a first heater(20), and a first protective film. The PBN crucible accepts materials. The first heater is deposited on the outer surface of the PBN crucible and forms a pattern proper for heating without influence of magnetic field on a specimen. The first protective film is deposited on the inner surface of the PBN crucible to protect the crucible from the specimen easy to adhere to PBN and partially removed for insulation from the first heater.