PROBE CARD AND TEST APPARATUS HAVING THE SAME

摘要

PURPOSE: A probe card and test device with the same are provided to form a MEMS(Micro Electro Mechanical Systems) switch and a probe pin in the same probe card, thereby increasing inspection reliability by minimizing the distance between the MEMS switch and the probe pin. CONSTITUTION: A first input terminal(10a) and a second input terminal(10b) receive a first input signal and a second input signal. A first input terminal MEMS switch(20a) is located between the first input terminal and an input probe pin(50). A second input terminal MEMS switch(20b) is located between the second input terminal and the input probe pin. The first and second input terminal MEMS switches comprise a controller(5) and a connection unit(6). A first output terminal MEMS switch(90a) is located between a first output terminal(100a) and an output probe pin(60). A second output terminal MEMS switch(90b) is located between a second output terminal(100b) and the output probe pin.