首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
UV-Strahlungsüberwachung in der Halbleiterverarbeitung unter Anwendung eines temperaturabhänigen Signals
摘要
申请公布号
DE102009039417(A8)
申请公布日期
2011.06.01
申请号
DE200910039417
申请日期
2009.08.31
申请人
GLOBALFOUNDRIES DRESDEN MODULE ONE LTD. LIABILITYCOMPANY & CO. KG;GLOBALFOUNDRIES INC.
发明人
MAYER, ULRICH;SCHEPERS, THORSTEN
分类号
H01L21/66;G01N21/84;G21K5/00;H01L21/3105
主分类号
H01L21/66
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Metalindeholdende membraner
ANTIMICROBIAL ACRYLIC POLYMER
METHOD AND SYSTEM FOR ANTI-ALIASING BY PIXEL SAMPLING
Fremgangsmåde og anordning til afköling af et stålbånd
LIGHT GUIDE PLATE IN USE WITH LED BACKLIGHT UNIT
SYSTEM AND METHOD FOR DETERMINING SYNCHRONIZATION POINT IN OFDM MODEMS FOR ACCURATE TIME OF FLIGHT MEASUREMENT
PROGRAMMING NON-VOLATILE MEMORY
IMIDAZO-BENZODIAZEPINE DERIVATIVES
PROCESS FOR PREPARING PURINE COMPOUNDS
METHOD FOR DETERMINING THE SET RELATIVE POSITION OF A PATIENT IN A DENTAL PANORAMA X-RAY APPARATUS OR THE SET PATH OF WHICH THIS APPARATUS IS MOVED WITH REGARD TO A PATIENT, AND A DEVICE SUITED THEREFOR
SOURCE DRIVER CONTROL DEVICE AND SOURCE DRIVER CONTROL METHOD
CLAMP FOR ARCHITECTURAL SCAFFOLD
BENZOXAZINE FOR TREATING RESPIRATORY TRACT DISEASES
MEDIATOR-MODIFIED REDOX BIOMOLECULES FOR USE IN ELECTROCHEMICAL DETERMINATION OF ANALYTE
TREATMENT OF SKIN WITH LIGHT AND A BENEFIT AGENT
METHOD FOR MANUFACTURING COMPENSATION FILM FOR ANGULAR FIELD OF VIEW BY USING NEMATIC CRYSTAL AND COMPENSATION FILM FOR ANGULAR FIELD OF VIEW USING THEREOF
COMPOSITION OF POLYBUTYLENETEREPHTHALATE RESIN HAVING GOOD HEAT RESISTANCE AND MOLD SHRINKAGE
METHOD FOR FORMING RESIST PATTERN
END COVER
APPARATUS FOR REMOVING SHEAR MARK OF GLASS TUBE
