| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressurization-type treating liquid supply device capable of preventing excessive tightening of a cover into a bottle that stores the treating liquid and detecting closure of the cover to secure the sealability of the cover. SOLUTION: The device is provided with the cover 10 that has a communicating path 12 of a coating liquid supply pipe 1 and a pressurized gas introducing path 13 and is closed through a sealing member 11 put into a mouth section 2a of the bottle 2, a mounting member 20 that is connected by being screwed into a thread section 2b provided in the mouth section of the bottle, a cover pressing member 30 that is communicated with the mounting member and has an inward flange section 32 that is rotatably fitted into a stepped groove 14 provided in the cover, an operating member 50 that is slipably engaged with the cover pressing member and where resiliency in the directions that mutually fall off of a compression spring member 40 is energized, a torque transmission member 60 that is rotatably formed with the cover pressing member and is engaged with the operating member by the resiliency of the compression spring and where the engagement is releasable against the resiliency, and a pressure sensor 70 that senses a pressure at a time when the cover closes the mouth section of the bottle. COPYRIGHT: (C)2008,JPO&INPIT |
