Vorrichtung zum Beschichten von Substraten,申请号DE200410006849-传众专利搜索

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发明名称	Vorrichtung zum Beschichten von Substraten
摘要
申请公布号	DE102004006849(B4)	申请公布日期	2011.06.01
申请号	DE200410006849	申请日期	2004.02.12
申请人	ALD VACUUM TECHNOLOGIES AG	发明人	HOFFMANN, JOSEF;EBERHARDT, HELMUT;SESERKO, PAVEL
分类号	C23C14/56;C23C14/30;H01J37/305	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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