| 摘要 |
PURPOSE: A valve used for a continuous fluorine gas supplying device is provided to efficiently block the leakage of fluorine gas by filling a metal packing in an insertion groove of a discharge pipe using a protruded frame. CONSTITUTION: A protruded frame is formed on one side of a flange(44). A circular groove(50) is formed on the other side of a discharge pipe(26) corresponding to the protruded frame. The protruded frame of the flange pressurizes a metal packing when a connection pipe(42) is pressurized. The metal packing is filled in the circular groove of the discharge pipe. The connection pipe is fixed to the discharge pipe with a nut(41).
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