UNIT FOR TRANSFERRING A SUBSTRATE AND APPARATUS FOR TRANSFERRING A SUBSTRATE INCLUDING THE SAME

摘要

PURPOSE: A substrate transferring unit and substrate transferring device with the same are provided to have a sensing unit which senses first and second transfer units located on the same plane, thereby preventing the substrate from being drooped by uniformly supporting the substrate. CONSTITUTION: A transfer chamber(110) provides a substrate transferring space to elevate a substrate(G). The transfer chamber comprises a first sidewall(111), a second sidewall(112), a third sidewall(113), and a fourth sidewall(114). The third and fourth sidewalls connect the first and second sidewalls. A first transfer unit(120) is coupled with the first sidewall. A second transfer unit(130) is coupled with the second sidewall. A sensing unit senses the rotation angles of the first and second transfer units.