STRUCTURED ABRASIVE ARTICLE, METHOD OF MAKING THE SAME, AND USE IN WAFER PLANARIZATION,申请号EP20090810426-传众专利搜索

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发明名称	STRUCTURED ABRASIVE ARTICLE, METHOD OF MAKING THE SAME, AND USE IN WAFER PLANARIZATION
摘要
申请公布号	EP2327088(A2)	申请公布日期	2011.06.01
申请号	EP20090810426	申请日期	2009.07.30
申请人	3M INNOVATIVE PROPERTIES COMPANY	发明人	JOSEPH, WILLIAM, D.;QIAN, JULIE, Y.;BARAN, JIMMIE, R., JR.;GAGLIARDI, JOHN, J.
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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