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发明名称
METHOD OF CHARACTERIZING DIELECTRIC FILMS BY ULTRAVIOLET PHOTOEMISSION SPECTROSCOPY
摘要
申请公布号
EP2326942(A1)
申请公布日期
2011.06.01
申请号
EP20090782990
申请日期
2009.09.15
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES
发明人
MARTINEZ, EUGENIE;GUEDJ, CYRIL
分类号
G01N23/227
主分类号
G01N23/227
代理机构
代理人
主权项
地址
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LIQUID DELIVERY PUMP
