| 摘要 |
A storage node structure includes a substrate having thereon a conductive block region; an etching stop layer covering the conductive block region; a conductive layer penetrating the etching stop layer and electrically connecting the conductive block region; an annular shaped conductive spacer on sidewall of the conductive layer, wherein the annular shaped conductive spacer is disposed on the etching stop layer and wherein the annular shaped conductive spacer and the conductive layer constitute a storage node pedestal; and an upper node portion stacked on the storage node pedestal.
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