Novel Sulfonate Salts and Derivatives, Photoacid Generators, Resist Compositions, and Patterning Process,申请号KR20060030950-传众专利搜索

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发明名称	Novel Sulfonate Salts and Derivatives, Photoacid Generators, Resist Compositions, and Patterning Process
摘要
申请公布号	KR101038122(B1)	申请公布日期	2011.05.31
申请号	KR20060030950	申请日期	2006.04.05
申请人		发明人
分类号	C07C323/22;C07C309/12;C07C323/10;G03F7/039	主分类号	C07C323/22
代理机构		代理人
主权项
地址

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