发明名称 |
Light-modulating nano/micro scale aperture array device having immersion layer and high speed nano scale pattern recording system using the same |
摘要 |
An optical modulating fine aperture array device is provided. The device includes a spatial light modulation unit provided with at least one light capacity cell arranged in a shape of a matrix, wherein each of the light capacity control cells is capable of individually controlling a degree of an inputted light which passing therethrough. A micro-lens array is provided with at least one micro-lens arranged in a shape of a matrix, wherein each of the micro-lenses condenses the light passing through each of the light capacity control cells. A substrate is made of an optical transparent material. The micro-lens array is attached to one side of the substrate. An aperture array is arranged on other side surface of the substrate and provided with at least one fine aperture. An immersion thin film layer is made of an optically transparent dielectric, including and formed to have a predetermined thickness from the aperture array.
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申请公布号 |
US7952684(B2) |
申请公布日期 |
2011.05.31 |
申请号 |
US20050662934 |
申请日期 |
2005.07.22 |
申请人 |
INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY |
发明人 |
HAHN JAE WON |
分类号 |
G03B27/42;G03B27/52;G03B27/54;G03B27/72 |
主分类号 |
G03B27/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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