发明名称 |
Phase-change nonvolatile memory device using Sb-Zn alloy |
摘要 |
Provided are a phase-change nonvolatile memory device and a manufacturing method thereof. The device includes: a substrate; and a stack structure disposed on the substrate and including a phase-change material layer. The phase-change material layer is formed of an alloy of antimony (Sb) and zinc (Zn), so that the phase-change memory device can stably operate at high speed and reduce power consumption.
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申请公布号 |
US7952086(B2) |
申请公布日期 |
2011.05.31 |
申请号 |
US20080122152 |
申请日期 |
2008.05.16 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
YU BYOUNG GON;YOON SUNG MIN;CHOI SE YOUNG;PARK TAE JIN |
分类号 |
H01L45/00 |
主分类号 |
H01L45/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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